Institut für Elektroprozesstechnik

New applications of EPM in metal, oxide and semiconductor processing

verfasst von: Bernard Nacke
Organisationseinheit(en): Institut für Elektroprozesstechnik
Typ: Aufsatz in Konferenzband
Seiten: 45-51
Publikationsdatum: 2007
Publikationsstatus: Veröffentlicht

BibTeX

@inproceedings{e607a9cf1c8c4499b82a5fea252ab69e,
title = "New applications of EPM in metal, oxide and semiconductor processing",
author = "Bernard Nacke",
year = "2007",
language = "English",
isbn = "978-1-60423-930-0",
pages = "45--51",
booktitle = "Driving the engines in change manufacturing",
publisher = "ASM International",
address = "United States",
note = "24th ASM Heat Treating Society conference ; Conference date: 17-09-2007 Through 19-09-2007",
}

Letzte Änderung: 19.01.23 Druckversion