@inproceedings{ba566fb85a0a484fbef1dbaf6574a6e2,
title = "Optimized induction heating in planetary reactors for semiconductor industry",
author = "Bernard Nacke and Alexandre Nikanorov and T. Zedler",
year = "2010",
language = "English",
isbn = "978-88-89884-13-3",
pages = "713--718",
booktitle = "Induction, dielectric and microwaves, conduction & electromagnetic processing",
publisher = "SGEditoriali",
note = "International Symposium on Heating by Electromagnetic Sources, HES ; Conference date: 18-05-2010 Through 21-05-2010",
}
