Numerical 2D modelling of turbulent melt flow in CZ system with dynamic magnetic fields

verfasst von: A. Krauze, A. Muiznieks, A. Mühlbauer, Th Wetzel, L. Gorbunov, A. Pedchenko, J. Virbulis
Abstract: The paper presents results of 2D axisymmetric mathematical modelling of laboratory CZ model facility that corresponds well to a large industrial silicon CZ growth system. The purpose of the investigation is to examine turbulent melt flow features that develop in the model crucible, when various dynamic magnetic fields (travelling, alternating) are applied, and to test the applicability of the modified low Re k-ε turbulence model for the calculation of flows in these cases by extensive comparisons between calculated and measured data. The electromagnetic field is calculated with a self-developed program, and the calculations of the melt motion are carried out with the user modified hydrodynamic program package CFD-ACE. Extremely fine grid and the modified low Re k-ε turbulence model are used in hydrodynamic calculations. The flow features and temperature fields are investigated, and the influence of dynamic field strength and crucible and crystal rotation is shown. A comparison between calculation results and temperature measurements in a corresponding laboratory model with low-temperature InGaSn eutectic has shown good agreement.
Organisationseinheit(en): Institut für Elektroprozesstechnik
Externe Organisation(en): University of Latvia
Siltronic AG
Ctr. for Precesses' Anal./Research
Typ: Konferenzaufsatz in Fachzeitschrift
Journal: Journal of crystal growth
Band: 266
Seiten: 40-47
Anzahl der Seiten: 8
ISSN: 0022-0248
Publikationsdatum: 15.05.2004
Publikationsstatus: Veröffentlicht
Peer-reviewed: Ja
ASJC Scopus Sachgebiete: Physik der kondensierten Materie, Anorganische Chemie, Werkstoffchemie
Elektronische Version(en): https://doi.org/10.1016/j.jcrysgro.2004.02.028 (Zugang: Geschlossen)

BibTeX

@article{2795106a2c3f4b6ab68cc53e2aaea89d,
title = "Numerical 2D modelling of turbulent melt flow in CZ system with dynamic magnetic fields",
abstract = "The paper presents results of 2D axisymmetric mathematical modelling of laboratory CZ model facility that corresponds well to a large industrial silicon CZ growth system. The purpose of the investigation is to examine turbulent melt flow features that develop in the model crucible, when various dynamic magnetic fields (travelling, alternating) are applied, and to test the applicability of the modified low Re k-ε turbulence model for the calculation of flows in these cases by extensive comparisons between calculated and measured data. The electromagnetic field is calculated with a self-developed program, and the calculations of the melt motion are carried out with the user modified hydrodynamic program package CFD-ACE. Extremely fine grid and the modified low Re k-ε turbulence model are used in hydrodynamic calculations. The flow features and temperature fields are investigated, and the influence of dynamic field strength and crucible and crystal rotation is shown. A comparison between calculation results and temperature measurements in a corresponding laboratory model with low-temperature InGaSn eutectic has shown good agreement.",
keywords = "A1. Computer simulation, A1. Fluid flows, A1. Heat transfer, A2. Industrial crystallization, A2. Magnetic field assisted Czochralski method, B2. Semiconducting silicon",
author = "A. Krauze and A. Muiznieks and A. M{\"u}hlbauer and Th Wetzel and L. Gorbunov and A. Pedchenko and J. Virbulis",
note = "Copyright: Copyright 2008 Elsevier B.V., All rights reserved.; Fourth International Workshop on Modeling ; Conference date: 04-11-2003 Through 07-11-2003",
year = "2004",
month = may,
day = "15",
doi = "10.1016/j.jcrysgro.2004.02.028",
language = "English",
volume = "266",
pages = "40--47",
journal = "Journal of crystal growth",
issn = "0022-0248",
publisher = "Elsevier",
number = "1-3",
}