Investigation of asymmetry effects in a heater-magnet module for TMF VGF and LEC growth by three-dimensional numerical modeling

verfasst von
H. Kasjanow, B. Nacke, St Eichler, D. Jockel, Ch Frank-Rotsch, P. Lange, F. M. Kießling, P. Rudolph
Abstract

Three-dimensional (3D) electromagnetic computer modeling is used to analyze the effects of asymmetry at the crystal growth by the vertical gradient freeze (VGF) and liquid encapsulation Czochralski (LEC) methods under traveling magnetic fields (TMF). Based on the results a heater-magnet module (HMM), combining the generation of heat and induction of magnetic field, was developed and optimized. It will be shown that asymmetry effects are caused by the designs of the heater-magnet coils and bus bars. They are enforced when a TMF of higher frequencies is used. It can be concluded that for VGF arrangements without container rotation the module design must be modified. Compared to that in case of LEC the effect of asymmetry can be effectively graduated by crucible and crystal rotations.

Organisationseinheit(en)
Institut für Elektroprozesstechnik
Externe Organisation(en)
Leibniz-Institut für Kristallzüchtung (IKZ)
Freiberger Compound Materials GmbH
Typ
Artikel
Journal
Journal of Crystal Growth
Band
310
Seiten
1540-1545
Anzahl der Seiten
5
ISSN
0022-0248
Publikationsdatum
04.2008
Publikationsstatus
Veröffentlicht
Peer-reviewed
Ja
ASJC Scopus Sachgebiete
Physik der kondensierten Materie, Anorganische Chemie, Werkstoffchemie
Elektronische Version(en)
https://doi.org/10.1016/j.jcrysgro.2007.10.077 (Zugang: Geschlossen)